Mass Flow Meter

Mass Flow Meters for Inert Gases Vacuum (to 300 torr) and Pressure Applications

Additional Informative Links

Applications

Vacuum Evaporation Coating
Vacuum Sputtering
Ion-Beam Deposition
E-Beam Coating Systems
Gas Mixing
High Temperature Furnace Gas Control
Membrane Testing
Fuel Cell Research
Environmental Air Sampling
Research Applications

Options for Apex Mass Flow Meters

High Accuracy Calibration available
Remote Display Options
ATEX designs available on request
Secondary outputs available
0-5V, 0-10V or 4-20 mAmp control standard
EtherNet/IP Modbus-RTU (RS-232))
Modbus-RTU (RS-485)
RS-485
DeviceNet, EtherCat, Ethernet IP, Profibus
Totalizer (No additional Cost)
Battery powered option available

Can Your Mass Flow Meter Measure >130 Different Gases? We Can!

What Makes us Different?

Multi-Gas Capability – >130 On-Board Interchangeable Gases
Multiple Control Options- Local on Keypad, Analog, RS-232 all standard
Addressable RS-232 Digital Control Capability Connect 26 Apex Devices with BB9 Hub
FlowVision Computer Control/GraphingSsoftware
Accuracy of 0.2% Full Scale plus 0.8% Direct Reading ( Models 5 sccm or less or above 50 SLPM pr more)
Accuracy of ±0.6% of reading or ±0.1% of full scale, whichever is greater (Models 10 sccm to 20 slpm)
High Accuracy Calibration Option of ±0.4% of reading and ±0.2% of full scale (Models 5sccm or greater)
Steady State Control Range 0.01–100% of full scale
Flow Ranges from 5000 SLPM to 0.5 SCCM
For end users, no power supply/display boxes needed
RS-232 on all models with software available
MKS, Aalborg, P-Nucleus, Brooks, Hastings, Sierra & Alicat Pinouts Available for competitor replacement
High Tech, Low Cost

Types of Apex Mass Flow Meters

Apex Mass Flow Meter

The Apex Mass Flow Meter is standard for most applications either vacuum (limited range) or pressure. We offer for the price the most accurate and also fastest update time of any MFM on the market. Options available are numerous to customize your mass flow meter for your specific application. You can add features/options such as high calibration, totalizer function, and custom VCR gas fittings. Our on-board controller allows you to set our MFM without expensive rack mount control boxes. Using our PID parameters, you can further customize the speed and update times to better meet your application needs.

Apex Aggressive Gas Mass Flow Meter

The Apex Aggressive Gas Mass Flow Meter provides flow metering of some of the harshest applications. Gases include ammonia, butylene, chlorine, dimeth ylether, hydrogen sulfide, silane and others. The Apex Aggressive Gas Series uses alternative seals compatible with these and other aggressive/corrosive gases that normally are problematic with the standard Viton seals. Each Aggressive Gas Apex MFM comes with all inert and other gases in the library. Output connectors can be the standard NPT or welded VCR.