Manual Semi Gate Valve

Description

Plug-in compatible with standard valves; easily replace valves in the field. Ultra clean for use in a clean vacuum environment. For more information on the semiconductor gate valves we offer, please click here.

    Specifications

    • Vacuum range1 x 10-10 Torr
    • Leak test1 x 10-10 atm cc/sec of He
    • Bake temperature200 C
    • Life250,000 Cycle
    • Time from open-close< 1.5 sec
    • Position Indicator28 VDC or 115 VAC
    • MaterialStainless Steel

    Manual Semi Gate Valve

    PORT A (inch) B (inch) C (inch) D (inch)
    1.5" 2.06 10.58 2.74 2.56
    2.0" 2.85 13.06 3.92 2.52
    2.5" 2.66 13.06 3.92 2.52
    3.0" 2.52 19.65 5.51 3.74
    4.0" 3.15 19.71 5.83 3.74
    6.0" 3.39 23.00 7.48 3.74
    8.0" 3.39 28.41 9.41 3.90
    10.0" 4.09 34.28 11.57 4.33