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Pneumatic Stainless Low Particle Poppet Valve
Pneumatic Stainless Low Particle Poppet Valve - Image 2

Pneumatic Stainless Low Particle Poppet Valve

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Description

Low Particle(LP) poppet valve was field tested and proven to improve yield in a harsh or corossive environment such as Etch or CVD processes.  The entire mechanisms are shielded and completely cleared from gas flow, thus creating a very clean environment.  Can be installed upstream of the chamber if necessary.  Sizes available in 1.0″, 1.5″ and 2.0″. To specify LP style, add -LP at the end of part number.  Example: AVP-KF25-LP.

    Specifications

    • Vacuum range1 x 10-9 Torr
    • Leak test1 x 10-9 atm cc/sec of He
    • Bake temperature120oC
    • MTTF (life)1,500,000 Cycle
    • Time from open-close< 0.5 sec
    • Operating temperature20o to 100oC
    • Differential pressure15 psi
    • Position Indicator28 VDC or 115 VAC
    • Operating pressure60 - 95 psi

    Pneumatic Stainless Low Particle Poppet Valve

    Part No A (inch) B (inch) C (inch)
    AVP-KF25-LP 2.06 2.03 6.20
    AVP-KF40-LP 2.40 2.56 7.83
    AVP-KF50-LP 2.75 2.01 10.4