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Pneumatic Harsh Environment Gate Valve

Pneumatic Harsh Environment Gate Valve

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Description

Designed for harsh and dirty environment such as MOCVD, ALD, or PECVD in presence of corrosive chemical and high temperature. Corrosive condensate can cause failure in bearing and linkages. Easy cleaning or replacement.

    Specifications

    • Vacuum range8 x 10-9 Torr
    • Leak test1 x 10-9 atm cc/sec of He
    • Bake temperature150 C
    • Life250,000 Cycle
    • SealViton (FKM)
    • Operating temperature100 to 150 C
    • Position Indicator28 VDC or 115 VAC

    Pneumatic Harsh Environment Gate Valve

    PORT A (inch) B (inch)
    ISO80 17.38 2.76
    ISO100 17.42 2.76
    ISO160 27.18 3.54