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Pneumatic Semi Gate Valve

Pneumatic Semi Gate Valve

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Description

Plug-in compatible with standard valves; easily replace valves in the field. Ultra clean for use in a clean vacuum environment. For more information on the semiconductor gate valves we offer, please click here.

    Specifications

    • Vacuum range1 x 10-10 Torr
    • Leak test1 x 10-10 atm cc/sec of He
    • Bake temperature200 C
    • Life250,000 Cycle
    • Time from open-close< 1.5 sec
    • Position Indicator28 VDC or 115 VAC
    • MaterialStainless Steel

    Pneumatic Semi Gate Valve

    PORT A (inch) B (inch) C (inch) D (inch)
    1.5" 2.06 10.12 2.74 2.28
    2.0" 2.85 13.17 3.92 2.68
    2.5" 2.66 13.17 3.92 2.68
    3.0" 2.52 19.27 5.51 2.68
    4.0" 3.15 19.27 5.83 2.52
    6.0" 3.39 23.48 7.48 3.03
    8.0" 3.39 29.25 9.41 3.70
    10.0" 4.09 35.55 11.57 4.88
    12.0" 4.16 41.97 14.49 5.51
    14.0" 4.55 47.56 16.77 6.26
    16.0" 4.65 56.18 19.09 6.85
    20.0" 4.81 79.06 24.02 4.57
    22.0" 5.05 86.69 25.67 5.71
    24.0" 5.68 92.60 27.64 5.71
    30.0" 6.78 120.55 34.25 6.69